Surface Integrity in Ultrahigh Speed Micromachining
نویسندگان
چکیده
منابع مشابه
Surface Micromachining for Microelectromechanical Systems
Surface micromachining is characterized by the fabrication of micromechanical structures from deposited thin films. Originally employed for integrated circuits, films composed of materials such as low-pressure chemical-vapor-deposition polycrystalline silicon, silicon nitride, and silicon dioxides can be sequentially deposited and selectively removed to build or “machine” three-dimensional stru...
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ژورنال
عنوان ژورنال: Procedia Engineering
سال: 2011
ISSN: 1877-7058
DOI: 10.1016/j.proeng.2011.11.095